New Features of Support of KLA/Tencor Metrology Systems
KLA Tencor has recently introduced the Aleris family of metrology system.
This metrology system is the
first in the industry that can combine the production-worthy composition and multi-layer film...
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New Features of Support of KLA/Tencor Metrology Systems
KLA Tencor has recently introduced the Aleris family of metrology system.
This metrology system is the
first in the industry that can combine the production-worthy composition and multi-layer film thickness
metrology.
This technology stays ahead in core optical technology in providing accurate thickness of the
film layers.
This system features a new composition in measuring and monitoring gate and other critical
layers of the product wafers.
This technology has also improved the two dimensional meteorology
capabilities in managing the high stress layers when the number increases.
The chip makers have so far purchased separate analytical and traditional optical thickness metrology
tools to obtain the thickness and the measurements.
But after the introduction of the KLA-Tencor
meteorology systems the mix and match method has meant overcoming the inefficiencies of poor tool to
tool matching, difficult capacity backup and incomp
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